(Click graphic to open chart in pdf)
Comments on the edited version, (Gupta, April 2003):
A future update will include the development of accelerometers and printer inkjets. Accelerometers evolved over the 1980's and into the following decades, involving companies such as Analog Devices, Motorola, and Bosch in Germany. Inkjet heads for printers have charted an even more explosive growth.
"MEMS" is an evolution of basic sensor and actuator technology, and today encompasses most aspects of micromachining based on photolithography for materials extending beyond simply crystal silicon and polysilicon micromachining. The work which has been done in the last decade in areas outside of traditional silicon-based MEMS is enormous. This chart is neither current, nor exhaustive, and any suggestions for additions are welcome. Comments can be sent through our on-line comment form.
Notes from the original print by NovaSensor, circa 1990:
This Genealogy Chart provides a brief history of the leading micromachining and solid-state sensor companies which brought the technology to its present status. It acknowledges our intellectual debt to the accumulated experience of the many researchers and technologists who have laid the groundwork which made silicon micromechanics possible. We deem the pioneering work of Bell Laboratories, Kulite Semiconductor, Honeywell, Fairchild, IBM, Stanford, UC Berkeley, and the University of Michigan of particular importance.
The founders of NovaSensor believe that the efforts outlined in the Genealogy chart has produced a critical mass of technology and customer interest sufficient to make the next ten years "The Decade of Micromachined Sensors". NovaSensor was created in late 1985 as the first company in the world with the objective of bringing the state-of-the-art in silicon micromechanics to volume applications. Our key personnel came from two distinctively areas; we have merged the best academic micromachinists and the best industrial technologists into one efficient, result-oriented team. This combination allows our customers to inspire NovaSensor to product innovation resulting in year 2000 technology today.