Downloadable Files

Mathematica

• Equations predicting nonlinear membrane deflection under uniform pressure.
• Calculations for mechanical resonant frequencies of euler beams.
• Calculating wafer bow due to a thin stressy layer deposition.
• Predicting transient motion of a simple spring - mass - parallel-plate capacitor under an applied voltage.

MATLAB

• Finite-difference scripts for calculating electrostatic deflection and pull-in of MEMS cantilevers, clamped-clamped beams and clamped circular diaphragms.

CoventorWare 2003.1

• Material Property Database (MPD file) - Nov 2003.