The 3D solid model for the single mirror below is based on public literature and educated guesses for the fabrication process and device dimensions.
The following shows the mesh on one of the drive electrodes.
It is used for electrostatic capacitance & charge simulations.
The surface charge distribution below is calcuated by a
boundary-element method (BEM). This will determine the
electrostatic force which will rotate the mirror into
contact with an underlying electrode at the same potential.
The tilted mirror is shown in three different perspectives
below. The color countors are the magnitude of the
von Mises stress, and are highest in the regions of
contact and in the torsional arms.
Finally, the deflection versus a single drive electrode
voltage is plotted, showing pull-in to contact and beyond
allowing for slight bending of the contact springs.
This 100X Nomarski photo of microelectromechanical (MEMS)
clamped-clamped beams shows that the 800um and 1mm long
are buckled because of excessive compressive stress.
These beams are fabricated using polysilicon micromachining.
(Click to animate image above)
This 150X interferometric black and white image of an
unactuated octagonal mirror shows spherical curvature.
The AVI animation linked to the photo (Real
Audio Player needed, 776k,avi) is a sequence of static images
0 to 100 volts in 5 volt increments. Note: Between a
full-phase of intensity variations, each fringe
measures a surface height difference of 225nm.