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<img width=410 height=273 src="../_UserImages/MUMPs14b.jpg" alt="MEMS Polysilicon Beams"> <p> This 100X Nomarski photo of microelectromechanical (MEMS) clamped-clamped beams shows that the 800um and 1mm long are buckled because of excessive compressive stress. These beams are fabricated using polysilicon micromachining. <BR><BR> The airgap separating the capacitive electrodes formed by the beams and the substrate narrows with applied voltage, allowing the beam to deform and pull-in (contact). With oscillating voltages, the beams can mechanically resonate at several 10's of kilohertz and higher. <p> <a href="../_uimages/TiltingMirror.avi"><img width=400 height=300 border=0 src="../_UserImages/TiltingMirrorPreview.jpg" alt="TiltingMirrorVideo"></a> <p> This 150X interferometric black and white image of an unactuated octagonal mirror shows spherical curvature. The AVI animation linked to the photo (Real Audio Player needed, <a href="../_uimages/TiltingMirror.avi">776k,avi</a>) is a sequence of static images 0 to 100 volts in 5 volt increments. Note: Between a full-phase of intensity variations, each fringe measures a surface height difference of 225nm. <BR><BR> The multiple fringes can be deconvolved to give a precise and continuous elevation plot of the mirror surface. By using <a href="http://optics.tu-graz.ac.at">IDEA</a> an FFT-based deconvolver, the interferometric data produces the following contour plot (<a href="../_uimages/MirrorSurfaceColorContourPlot.jpg">101k,jpg</a>). <BR><BR> This associated animation (<a href= "../_uimages/3DGimbalActionSimulation.mpg">1.8M,mpeg</a>) shows the dual-axis gimbal action of the micromirror based on 3D FEM results from <a href= "http://www.coventor.com">(CoventorWare)</a>.
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