+ High-aspect ratio electroplating on rough substrate (Pre-1995)![]() + Microlithography on macromachined nonplanar surfaces
Double-sided etching of a molybdenum hemispherical structure.
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Lithography and definition of a resistor along the length of a 60 mil OD tube. ![]() + Multilevel silicon etching
An on-demand inkjet printhead created for XEROX.
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Deeply recessed poppet valve seat combining isotropic & anisotropic
etching (an aerospace application). ![]()
Nozzle and air-filter mating to previous structure. ![]()
Air-chamber, air-filters and cavity mating to previous two structures. ![]() + Other examples
Silicon optical bench consisting of bonded wafers and precision alignment.
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Uniform sidewall electroplating and definition of narrow metal traces. ![]()
Silicon atomic force microscope (AFM) cantilever. ![]() ![]()
Oxide-sharpened silicon-nitride AFM cantilever. ![]() ![]() |