+  High-aspect ratio electroplating on rough substrate (Pre-1995)

Plating, circa 1994

+  Microlithography on macromachined nonplanar surfaces

Double-sided etching of a molybdenum hemispherical structure.

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Lithography and definition of a resistor along the length of a 60 mil OD tube.

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+  Multilevel silicon etching

An on-demand inkjet printhead created for XEROX.

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Deeply recessed poppet valve seat combining isotropic & anisotropic etching (an aerospace application).

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Nozzle and air-filter mating to previous structure.

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Air-chamber, air-filters and cavity mating to previous two structures.

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+  Other examples

Silicon optical bench consisting of bonded wafers and precision alignment.

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Uniform sidewall electroplating and definition of narrow metal traces.

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Silicon atomic force microscope (AFM) cantilever.

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Oxide-sharpened silicon-nitride AFM cantilever.

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Additional Photos