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Fabrication Services
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While generalists in the field of micromachining, our core resides in
understanding materials and chemical processes, maximizing the potential
of available tools, and working with the latest advances in
micromachining. Examples include:
- Three-dimensional multistep isotropic & aniostropic etching
of various materials.
- Three-dimensional lithography over non-planar surfaces.
- Anodic, fusion, glass-frit, eutetic & thermocompression
wafer-to-wafer bonding.
- High aspect ratio electroplating and sidewall profiling.
- Macro- & micro-porous silicon.
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Past Efforts
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