|
|
Design Services
|
We use the best available design methods balanced with
practical experience to bring MEMS design concepts into
production.
Modeling tools are used to simulate design performance
before the expense of fabrication. Experimental characterization
test beds are created to assess device performance during
prototyping, with in-situ test structures used for
monitoring process repeatability and measuring material
properties. Yield & reliability specifications are determined
based on tolerances and materials concerns of the chosen
process. And foundry relationships are established to
transition from prototype to volume manufacturing.
Our recent projects have included:
- Finite-element modeling (FEM) for solid mechanics,
fluids, and heat transfer, and boundary-element
modeling (BEM) for fast capacitance
extraction.
- Thin-film materials characterization and reliability;
implementation of test structures for in-situ
measurement of biaxial stress and Young's modulus
in plated metal films.
- Electromechanical analysis of micromirrors,
accelerometers, pressure sensors, optical
displays, and other micromechanical
structures.
- Package modeling of thermal stresses & fracture due
to fatigue.
- Failure analysis of single-crystal silicon sensors.
Our design tools include CoventorWare, SDRC I-DEAS, MATLAB,
and Mathematica. We can integrate and are flexible in working
with most in-house design methodologies.
|
Fabrication Services
|
|
In partnership with a custom MEMS development facility we
provide services to design & to prototype unique micromachined
geometries, with strengths in these specific areas:
- 3D modeling in SDRC I-DEAS & SolidWorks. Mask
layout in AutoCAD & L-Edit.
- Generate proprietary process-flows and run-cards
for fabrication of various micromachined geometries,
piezoresistors, inductors, and capacitors.
- CMP, plasma deposition/etching, sputtering, lithography,
electroplating, and wet chemistry using KOH, TMAH &
HF.
- Novel micromachined 3D geometries.
With more than 40 combined years of experience in fabrication, we
pride ourselves in being able to micromachine structures that many
cannot. We look forward to your challenging needs. Photos of our
work can be found here.
Volant's promotional flier.
|
|
